基于GM制冷机的自由空间耦合条带单光子探测系统（特邀）

琚志平; 覃俭; 马若岩; 蒋燕阳; 王敏杰; 叶大鹏; 徐光照; 邢俊杰; 肖游; 李浩; 史经浩; 尤立星; 吕超林

doi:10.13756/j.gtxyj.2025.250083

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基于GM制冷机的自由空间耦合条带单光子探测系统（特邀）

专题：光量子芯片 | 更新时间：2025-06-18

- 基于GM制冷机的自由空间耦合条带单光子探测系统（特邀）
- Free-space Coupled Superconducting Nanostrip Single Photon Detector System based on GM Cryocooler
- 光通信研究 2025年第3期
- 作者机构：
  
  1.赋同量子科技（浙江）有限公司，浙江　嘉兴　 314100
  2.中国科学院上海微系统与信息技术研究所　上海市超导集成电路技术重点实验室，上海　 200050
  3.赋同量子科技（上海）有限公司，上海　 200050
- 作者简介：
  
  琚志平（1991-），男，湖北黄冈人。博士，主要研究方向为单光子源和单光子探测成像系统。
  覃俭（1993-），男，湖南邵阳人。博士，主要研究方向为量子光学和单光子源。
  吕超林，高级工程师，博士。E-mail：cllv@cnphotec.com
- 基金信息：
  
  上海市2024年度量子科技领域基金资助项目(25LZ2600500)
- DOI：10.13756/j.gtxyj.2025.250083
  中图分类号： TN248
- 收稿日期：2025-03-07，
  
  修回日期：2025-03-24，
  
  纸质出版日期：2025-06-10
- 稿件说明：
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琚志平，覃俭，马若岩，等. 基于GM制冷机的自由空间耦合条带单光子探测系统[J]. 光通信研究，2025(3): 250083.

Ju Z P, Qin J, Ma R Y, et al. Free-Space Coupled Superconducting Nanostrip Single Photon Detection System based on GM Cryocooler[J]. Study on Optical Communications, 2025(3): 250083.
琚志平，覃俭，马若岩，等. 基于GM制冷机的自由空间耦合条带单光子探测系统[J]. 光通信研究，2025(3): 250083. DOI： 10.13756/j.gtxyj.2025.250083.

Ju Z P, Qin J, Ma R Y, et al. Free-Space Coupled Superconducting Nanostrip Single Photon Detection System based on GM Cryocooler[J]. Study on Optical Communications, 2025(3): 250083. DOI： 10.13756/j.gtxyj.2025.250083.

摘要

【目的】

文章旨在设计并实现一种基于Gifford-McMahon（GM）制冷机的自由空间耦合超导条带单光子探测（SNSPD）系统，以解决传统光纤耦合方式系统在近/中红外波段和偏振敏感等应用中的局限性，进一步拓展SNSPD的应用场景。

【方法】

文章重点解决了低振动恒温腔设计、高温区SNSPD器件制备和跨温区滤波光路设计等关键技术问题。其中，低振动恒温器结合气体交换腔和波纹管软连接技术，有效抑制了制冷机的振动传导；SNSPD芯片通过调整优化无序氮化钛铌（NbTiN）薄膜的生长参数，实现了4.2 K温区的高探测效率；跨温区滤波光路采用多种商用滤波片组合和封装盒氧化发黑处理等手段成功抑制了环境杂散光和黑体辐射。

【结果】

低振动制冷机的最低温可达3.45 K，并可长期稳定在3.75 K，竖直方向的振动幅度峰峰值小于4 μm，光学对准效率接近90%；系统探测效率（SDE）在最低温时可达50%，系统暗计数率（DCR）为70 cps。

【结论】

文章所提系统解决了传统光纤耦合方式系统在特定应用场景中的技术瓶颈，其具备优异的波长普适性、灵活的信号光耦合调谐能力以及出色的偏振保持特性。未来通过优化系统工作温度、器件制备工艺和定制滤波片加工，有望实现更高的SDE和更低的DCR。

Abstract

【Objective】

This study aims to design and implement a free-space-coupled Superconducting Nanostrip Single Photon Detector (SNSPD) system based on a Gifford-McMahon (GM) cryocooler

addressing the limitations of traditional fiber-coupled systems in near/mid-infrared bands and polarization-sensitive applications

and thereby expanding the application scenarios of SNSPDs.

【Methods】

The paper focuses on addressing several key technical issues

including the design of low-vibration constant-temperature cavities

the preparation of SNSPD devices in high-temperature zones

and the design of filtering optical paths across temperature zones. Specifically

the low-vibration cryostat

combined with gas exchange chambers and bellows flexible connection technology

effectively suppresses the vibration transmission from the refrigerator. The SNSPD chip achieves high detection efficiency in the 4.2 K temperature zone by adjusting and optimizing the growth parameters of the disordered Niobium Titanium Nitride (NbTiN) thin film. The cross-temperature-zone filtering optical path successfully suppresses environmental stray light and blackbody radiation by using a combination of various commercial filter plates and oxidation-blackening treatment of the packaging box.

【Results】

The low-vibration refrigerator can reach a lowest temperature of 3.45 K

and can be stabilized at 3.75 K for a long time. The peak-to-peak value of the vibration amplitude is less than 4 μm. The optical alignment efficiency is close to 90%

and the System Detection Efficiency (SDE) can reach 50% at the lowest temperature. At this time

the Dark Count Rate (DCR) of the system is 70 cps.

【Conclusion】

This study successfully developed a GM cryocooler-based free-space-coupled SNSPD system

overcoming the technical limitations of traditional fiber-coupled systems in specific applications. The system exhibits excellent wavelength versatility

flexible signal-light coupling tunability

and superior polarization-maintaining performance. Future optimization of operating temperature

device fabrication processes

and customized filter design is expected to achieve higher SDE and lower DCR.

关键词

Keywords

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