The PVS spectra for GaAs、InP、InGaAs、InGaAsP etc. are reported in this paper. The PVS of InGaAsP(at the special component) is compared with its FFT - PL. The limitation and complexity for PVS are analysed and discussed. We show that the tested results can be understood correctly
it is necessary to combine device configuration
epitaxy technology with ECV tests for multilayer heterostructure materials.