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邮电部固体器件研究所
Published:1994,
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[1]李涛,梅锁海,刘文.565Mbit/s高速光通信系统用SAWF研制[J].光通信研究,1994(Z1):133-137.
Li Tao, Mei Suohai, Liu Wen. Design and Fabrication of SAWF for 565Mbit/s High Speed Optical Communication System. [J]. (Z1).(1994)
[1]李涛,梅锁海,刘文.565Mbit/s高速光通信系统用SAWF研制[J].光通信研究,1994(Z1):133-137. DOI:
Li Tao, Mei Suohai, Liu Wen. Design and Fabrication of SAWF for 565Mbit/s High Speed Optical Communication System. [J]. (Z1).(1994) DOI:
本文阐述了635.616MHz窄带SAWF设计特点,并着重对其叉指电极制作中的光刻、刻蚀及膜厚测量等工艺进行了探讨。该SAWF插入损耗小于15.5dB,Q值高于60O
In this paper
the design features of 635. 616MHz narrow band SAWF is presented
the lithography
dry etching and the film thickness measuring methods during the fabrication process are mainly discussed
the typical characteristics of the filters show the insertion loss less than 15. 5dB
and Q value more than 600.
声表波滤波器叉指电极刻蚀
surface acoustic filterIDTetching
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