The Interference Fringes of X-Ray Diffraction Rocking Curves from InGaAsP/InP Heteroepitaxy Materials

Ding Guoqing; Wi Minjian et al.

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The Interference Fringes of X-Ray Diffraction Rocking Curves from InGaAsP/InP Heteroepitaxy Materials

- The Interference Fringes of X-Ray Diffraction Rocking Curves from InGaAsP/InP Heteroepitaxy Materials
- Study on Optical communication Issue 2, (1995)
- 作者机构：
  
  1. 武汉电信器件公司
  2. 武汉工业大学
  3. 武汉纺织工学院
  4. 武汉电信器件公司武汉工业大学武汉纺织工学院
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN304.207
- Published：1995，
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[1]丁国庆,魏铭鉴,孙文华,崔光杰.InGaAsP／InP异质结构材料X射线衍射摇摆曲线中的干涉指纹研究[J].光通信研究,1995(02):30-34.

Ding Guoqing, Wi Minjian et al.. The Interference Fringes of X-Ray Diffraction Rocking Curves from InGaAsP/InP Heteroepitaxy Materials. [J]. (2).(1995)
[1]丁国庆,魏铭鉴,孙文华,崔光杰.InGaAsP／InP异质结构材料X射线衍射摇摆曲线中的干涉指纹研究[J].光通信研究,1995(02):30-34. DOI：

Ding Guoqing, Wi Minjian et al.. The Interference Fringes of X-Ray Diffraction Rocking Curves from InGaAsP/InP Heteroepitaxy Materials. [J]. (2).(1995) DOI：

摘要

双晶衍射摇摆曲线的全面分析需用计算机模拟高木方程才能得到，其信息广但不直观。本文讨论了ＭＯＣＶＤ外延片Ｘ射线衍射中的干涉指纹，指出了用干涉指纹测试薄膜厚度的精确性，讨论了干涉指纹出现的一些特征，使能直观地得到一些外延片的结构信息，为识别和正确使用干涉指纹估算薄层厚度提供依据。

Abstract

In this paper

the interference fringes of X-ray diffraction rocking curves from MOCVD epitaxial chips are discussed. They show the accuracy of measured thickness using the interference fringes method. The various characteristics of the interference fringes are also discussed in order to get some structure knowledges from the epitaxial chips by human eyes. It will be convenient to discriminate and use correctly the interference fringes.

关键词

摇摆曲线干涉指纹

Keywords

Rocking curvesInterference fringes

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