Quality Estimation of ⅢⅤ Group Compound  Semiconductor Epitaxy Chips

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Quality Estimation of ⅢⅤ Group Compound Semiconductor Epitaxy Chips

- Quality Estimation of ⅢⅤ Group Compound Semiconductor Epitaxy Chips
- Study on Optical communication Issue 3, (1998)
- 作者机构：
  
  武汉邮电科学研究院
- 作者简介：
- 基金信息：
- DOI：
  CLC： O471.4
- Published：1998，
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[1]丁国庆.Ⅲ-Ⅴ族化合物半导体外延晶片的质量评估[J].光通信研究,1998(03):57-62.

Ding Guoqing. Quality Estimation of ⅢⅤ Group Compound Semiconductor Epitaxy Chips. [J]. (3).(1998)
[1]丁国庆.Ⅲ-Ⅴ族化合物半导体外延晶片的质量评估[J].光通信研究,1998(03):57-62. DOI：

Ding Guoqing. Quality Estimation of ⅢⅤ Group Compound Semiconductor Epitaxy Chips. [J]. (3).(1998) DOI：

本文介绍了影响半导体异质外延晶片质量的主要因素，检测方法，几个典型测试结果。最后给出了几个外延晶片材料质量评估的参照标准。

The main factors affecting the quality of semiconductor heterostructure epitaxy chips

inspection methods and some typical test results have beeen introduced in this pater. Finally

some reference criteria for the quality inspection of epitaxy chip materials are given.

异质结构材料位错与缺陷X射线双晶衍射光荧光谱

heterostructure materialdislocation and defectXray double crystal diffractionphotoluminescence spectrum

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