Encapsulation of LRE System and Equipment Fabrication

Wang Jiao

doi:10.13756/j.gtxyj.1987.02.006

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Encapsulation of LRE System and Equipment Fabrication

- Encapsulation of LRE System and Equipment Fabrication
- Study on Optical communication Issue 2, Pages: 50-53(1987)
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- DOI：10.13756/j.gtxyj.1987.02.006
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- Published：1987，
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[1]王皎.液相外延系统的密封与设备制作[J].光通信研究,1987(02):50-53+38.

Wang Jiao. Encapsulation of LRE System and Equipment Fabrication. [J]. (2):50-53(1987)
[1]王皎.液相外延系统的密封与设备制作[J].光通信研究,1987(02):50-53+38. DOI： 10.13756/j.gtxyj.1987.02.006.

Wang Jiao. Encapsulation of LRE System and Equipment Fabrication. [J]. (2):50-53(1987) DOI： 10.13756/j.gtxyj.1987.02.006.

摘要

本文介绍了液湘外延系统设备的密封可靠性与真空度对外延片质量的影响。按要求设计、制作了操作方便、真空度高、密封性好、全硬接液相外延设备。

Abstract

In this paper

encapsulation reliability of LPE system and vacuum effects on wafers are reported. Fabrication of high quality all-metasl-connected LPE equipment is also described.

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Encapsulation of LRE System and Equipment Fabrication

DOI：10.13756/j.gtxyj.1987.02.006

摘要

Abstract

关键词

Keywords

references