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武汉电信器件公司
Published:1995,
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[1]刘涛,李同宁,金锦炎,李云樵,刘自力,王任凡,沈坤.用LP-MOCVD对InGaAs(P)/InP材料的工艺研究[J].光通信研究,1995(04):57-60.
Liu Tao Li Tongning Jin Jinyan. Process Investigation of InGaAs(P)/InP Materials by LP-MOCVD. [J]. (4):57-60(1995)
[1]刘涛,李同宁,金锦炎,李云樵,刘自力,王任凡,沈坤.用LP-MOCVD对InGaAs(P)/InP材料的工艺研究[J].光通信研究,1995(04):57-60. DOI: 10.13756/j.gtxyj.1995.04.004.
Liu Tao Li Tongning Jin Jinyan. Process Investigation of InGaAs(P)/InP Materials by LP-MOCVD. [J]. (4):57-60(1995) DOI: 10.13756/j.gtxyj.1995.04.004.
我们用AIXTRON生产的LP-MOCVD系统进行了InGaAs(P)/InP材料的生长研究
用X-ray双晶衍射仪、PL光荧光光谱仪、α-台阶仪及C-V仪等分析手段
研究生长工艺对材料特性的影响
取得了很好的结果。目前
我们已掌握一套MOCVD生长材料的标准参数
利用这些参数生长了1.31μm体材料激光器和量子阱激光器结构
阈值电流密度J
th
分别为1、1 kA/cm
2
和1.0 kA/cm
。
The LP-MOCVD epitaxial techniques are applied to study the crystal growth of material InGaAs(P)/InP. With the aids of measure methods
such as X-ray diffraction
photoluminescenee spectrum
α-step and C-V characteristics
the influence of growth processes on material characteristics is analyzed and the optimum growth parameters are obtained. In terms of these parameters
bulk material laser and quantum well laser emitting at 1.31 μm are fabricated with threshold current densities (Jth) 1.1kA/cm
and 1.0 kA/cm
respectively. This shows that we have grown high quality InGaAs(P) epitaxial strained layers.
MOCVD体材料量子阱超晶格
MOCVDbulk materialsquantum wellsuper lattices
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