MA Hui-lian, YANG Jian-yi, LI Jin, et al. Optical multi-mode interference power splitter in GaAs fabricated by preferential etching. [J]. (5):50-53(2000)
MA Hui-lian, YANG Jian-yi, LI Jin, et al. Optical multi-mode interference power splitter in GaAs fabricated by preferential etching. [J]. (5):50-53(2000) DOI: 10.13756/j.gtxyj.2000.05.010.
Optical multi-mode interference power splitter in GaAs fabricated by preferential etching
A multi-mode interference (MMI) GaAs 1×4 optical p ower splitter that can be directly coupled with single mode fiber array was fabr icated through optimized structure design and preferential etching. The 1.3 μm He-Ne laser measurement indicated that the device has basically realized the re quirement of uniform power splitting