V groove integrated with optical waveguide based on SOI

doi:10.13756/j.gtxyj.2003.04.016

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V groove integrated with optical waveguide based on SOI

- V groove integrated with optical waveguide based on SOI
- Study on Optical communication Issue 4, Pages: 55-57(2003)
- 作者机构：
  
  加拿大McMaster大学工程物理系
- 作者简介：
- 基金信息：
- DOI：10.13756/j.gtxyj.2003.04.016
  CLC： TN252
- Published：2003，
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[1]程振杰,彭治林.基于SOI的光波导和V形槽集成器件[J].光通信研究,2003(04):55-57+60.

V groove integrated with optical waveguide based on SOI. [J]. (4):55-57(2003)
[1]程振杰,彭治林.基于SOI的光波导和V形槽集成器件[J].光通信研究,2003(04):55-57+60. DOI： 10.13756/j.gtxyj.2003.04.016.

V groove integrated with optical waveguide based on SOI. [J]. (4):55-57(2003) DOI： 10.13756/j.gtxyj.2003.04.016.

摘要

文章介绍了一种基于SOI的集成半导体器件。设计了5μm×5μm的单模光波导

并用APSS软件进行了光场模式分析;利用KOH各向异性腐蚀制造了直的脊波导、Y分支器和V形槽;最后

利用紫外光敏胶将波导和光纤固定。

Abstract

This paper proposed an integrated semiconductor device based on SOI. A 5 μm×5 μm single mode waveguide was designed and its optical field was simulated with APSSsoftware. Strait rib waveguide

Y--branch and V--grove were made by KOH wet chemicaletching. Fiber was coupled with wavguide through UV--glue at last.

关键词

SOI光波导Y分支器V形槽

Keywords

SOIoptical waveguideY-branchV-groove

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Related Institution

School of Information Engineering, Nanchang University

College of Physics and Information Engineering, Fuzhou University

Institute of Space Science and Technology, Nanchang University

College of Electronic and Optical Engineering & College of Flexible Electronics (Future Technology), Nanjing University of Posts and Telecommunications

Bell Honors School, Nanjing University of Posts and Telecommunications

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