Progress in three-dimensional integrated optical beam splitters

SUN Yiling~1; JIANG Xiaoqing~2; YANG Jianyi~2; WANG Minghua~2

doi:10.13756/j.gtxyj.2006.03.019

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Progress in three-dimensional integrated optical beam splitters

- Progress in three-dimensional integrated optical beam splitters
- Study on Optical communication Issue 3, Pages: 61-63(2006)
- 作者机构：
  
  1.   深圳大学工程技术学院
  2.   浙江大学信息与电子工程学系
  3.   浙江大学信息与电子工程学系广东深圳518060
  4.   浙江杭州310027
- 作者简介：
- 基金信息：
- DOI：10.13756/j.gtxyj.2006.03.019
  CLC： TN256
- Published：2006，
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[1]孙一翎,江晓清,杨建义,王明华.三维集成光分束器的研究进展[J].光通信研究,2006(03):61-63.

SUN Yiling~1, JIANG Xiaoqing~2, YANG Jianyi~2, et al. Progress in three-dimensional integrated optical beam splitters. [J]. (3):61-63(2006)
[1]孙一翎,江晓清,杨建义,王明华.三维集成光分束器的研究进展[J].光通信研究,2006(03):61-63. DOI： 10.13756/j.gtxyj.2006.03.019.

SUN Yiling~1, JIANG Xiaoqing~2, YANG Jianyi~2, et al. Progress in three-dimensional integrated optical beam splitters. [J]. (3):61-63(2006) DOI： 10.13756/j.gtxyj.2006.03.019.

摘要

三维集成光分束器在保持二维集成光学器件的可靠性和结构稳定性的基础上

有效扩大了单个芯片上的通信信道数

增加了集成密度

缓和了二维平面结构输入输出困难等问题。文章对三维集成光分束器的研究进展进行了概述

详细介绍了已有的三维集成光分束器的结构及制作方法

并对其性能进行了比较。最后

展望了三维集成光分束器的应用前景。

Abstract

3-D optical beam splitters effectively increase the density of integrity and channel number and overcome some of the input/output problems in 2-D integrated optics while preserving the reliability and structural stability of the latter.This paper presents an overview of the advances in the research in 3-D integrated optical beam splitters

a detailed introduction to their existing structures and technological schemes and the comparisons of their performances and concludes with prospects for their applications.

关键词

三维集成光学光分束器多模干涉器件

Keywords

3-D integrated opticsoptical beam splittersmultimode interference couplers

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