A MEMS-based tunable optical filter

Zhou Tingting1; Xie Hui1; Sun Liping1; Hu Qianggao1

doi:10.13756/j.gtxyj.2011.04.006

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A MEMS-based tunable optical filter

- A MEMS-based tunable optical filter
- Study on Optical communication Issue 4, Pages: 23-25(2011)
- 作者机构：
  
  1. 光纤通信技术和网络国家重点实验室
  2. 武汉光迅科技股份有限公司
- 作者简介：
- 基金信息：
- DOI：10.13756/j.gtxyj.2011.04.006
  CLC： TN713
- Published：2011，
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[1]周婷婷,谢卉,孙莉萍,胡强高.一种基于MEMS技术的可调谐光滤波器[J].光通信研究,2011(04):23-25.

Zhou Tingting1, Xie Hui1, Sun Liping1, et al. A MEMS-based tunable optical filter. [J]. (4):23-25(2011)
[1]周婷婷,谢卉,孙莉萍,胡强高.一种基于MEMS技术的可调谐光滤波器[J].光通信研究,2011(04):23-25. DOI： 10.13756/j.gtxyj.2011.04.006.

Zhou Tingting1, Xie Hui1, Sun Liping1, et al. A MEMS-based tunable optical filter. [J]. (4):23-25(2011) DOI： 10.13756/j.gtxyj.2011.04.006.

摘要

文章介绍了一种基于微电子机械系统（MEMS）技术的可调谐光滤波器（TOF）

分析了其基本原理和光学结构

给出了合理的设计方案及所进行的实验验证。实验结果表明

该滤波器性能优良

20 dB带宽<0.65 nm

3 dB带宽<0.24 nm

整个光路的插损控制在2 dB以内。根据该方案设计的滤波器具有体积小、成本低和波长调谐范围大等特点

而且能实现窄带滤波

可以广泛用于光通信系统和传感领域。

Abstract

This paper presents a Micro Electro Mechanical Systems（MEMS）-based Tunable Optical Filter（TOF）

analyzes its fundamental principle and optical structure and works out a rational design

which is verified in experiments.The results indicate that it is characteristic of small volume

low cost and large range of wavelength tuning.Moreover

it can realize narrowband filtering

extensively applicable in the flied of optical communication and filtering.

关键词

微电子机械系统光栅可调谐光滤波器

Keywords

MEMSgratingtunable optical filter

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Department of Electronic Engineering, Taiyuan Institute of Technology

Weifang University of Science and Technology

College of Optoelectronic Science and Engineering,HUST

FiberHome Telecommunication Technologies Co., Ltd.

Wuhan National Laboratory for Optoelectronics

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