Advances in manufacturing processes for lithium niobate waveguides

Zhao Minglu1; Wang Dingli1; Ma Weidong1

doi:10.13756/j.gtxyj.2012.02.005

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Advances in manufacturing processes for lithium niobate waveguides

- Advances in manufacturing processes for lithium niobate waveguides
- Study on Optical communication Issue 2, Pages: 35-38(2012)
- 作者机构：
  
  1. 光纤通信技术和网络国家重点实验室
  2. 武汉光迅科技股份有限公司
- 作者简介：
- 基金信息：
- DOI：10.13756/j.gtxyj.2012.02.005
  CLC： TN252
- Published：2012，
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[1]赵明璐,王定理,马卫东.铌酸锂光波导制作工艺进展[J].光通信研究,2012(02):35-38.

Zhao Minglu1, Wang Dingli1, Ma Weidong1. Advances in manufacturing processes for lithium niobate waveguides. [J]. (2):35-38(2012)
[1]赵明璐,王定理,马卫东.铌酸锂光波导制作工艺进展[J].光通信研究,2012(02):35-38. DOI： 10.13756/j.gtxyj.2012.02.005.

Zhao Minglu1, Wang Dingli1, Ma Weidong1. Advances in manufacturing processes for lithium niobate waveguides. [J]. (2):35-38(2012) DOI： 10.13756/j.gtxyj.2012.02.005.

摘要

文章综述了几种常用的铌酸锂波导的制作工艺

包括表面外扩散、金属内扩散、离子交换和质子交换

并分析、比较和总结了在不同工艺制作的条件下对铌酸锂光波导的性能造成的不同影响。目前

获得高质量光波导的主要途径是Ti扩散和质子交换。同时

文章对逐渐建立起的铌酸锂波导光学特性和结构特性之间的理论关系也进行了介绍。

Abstract

This paper presents an overview of the theories and several commonly used manufacturing processes for lithium niobate waveguides

including out-diffusion of lithium oxide from the crystal surface

in-diffusion of metals

iron exchange and proton exchange

and analyzes

compares and summarizes the effects of different processes on the performances of the waveguides.At the present

Ti diffusion and proton exchange are the main channels for achieving high quality lithium niobate waveguides.In addition

it introduces the theoretical correlation between the optical properties and structural characteristics of lithium niobate waveguides gradually built up in recent studies.

关键词

铌酸锂光波导工艺

Keywords

Lithium niobateoptical waveguideProcess

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