Research on MEMS-based tunable external-cavity laser

Qian Kun1; Fu Yanfeng2; Zhang Di2; Tang Yi2

doi:10.13756/j.gtxyj.2012.02.008

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Research on MEMS-based tunable external-cavity laser

- Research on MEMS-based tunable external-cavity laser
- Study on Optical communication Issue 2, Pages: 48-50(2012)
- 作者机构：
  
  1. 光纤通信技术和网络国家重点实验室
  2. 武汉光迅科技股份有限公司
  3. 华中科技大学光电子科学与工程学院
- 作者简介：
- 基金信息：
- DOI：10.13756/j.gtxyj.2012.02.008
  CLC： TN248
- Published：2012，
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[1]钱坤,傅焰峰,张玓,唐毅.MEMS型可调外腔激光器的研究[J].光通信研究,2012(02):48-50.

Qian Kun1, Fu Yanfeng2, Zhang Di2, et al. Research on MEMS-based tunable external-cavity laser. [J]. (2):48-50(2012)
[1]钱坤,傅焰峰,张玓,唐毅.MEMS型可调外腔激光器的研究[J].光通信研究,2012(02):48-50. DOI： 10.13756/j.gtxyj.2012.02.008.

Qian Kun1, Fu Yanfeng2, Zhang Di2, et al. Research on MEMS-based tunable external-cavity laser. [J]. (2):48-50(2012) DOI： 10.13756/j.gtxyj.2012.02.008.

摘要

文章提出了一种以MEMS TOF（微电子机械系统可调光滤波器）和标准具作为波长选择元件

LC（液晶）作为相位补偿元件

平面反射镜提供光反馈的可调外腔半导体激光器结构。实际研制了该结构的激光器样品

实验测得该激光器的输出功率>10dBm

边模抑制比>50dB

可调谐范围达到7nm

线宽约为200kHz。

Abstract

A novel tunable external-cavity semiconductor laser structure is presented in this paper

in which an MEMS-based Tunable Optical Filter（TOF） and a silicon etlon are used as the wavelength selection components and a Liquid Crystal（LC） cell as the phase compensation element and a planar reflector to provide feedback.A laser sample in this structure is developed.The experimental results show that its output power and side mode suppression ratio are >10 dBm and >50 dB respectively

its tuning range is as high as 7 nm and its linewidth about 200 kHz.

关键词

微电子机械系统可调光滤波器可调外腔半导体激光器标准具

Keywords

MEMS TOFtunable external cavity laseretalon

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