Optimization of the wavelength-dependent loss of MEMS torsion mirror-based variable optical attenuators

Chen Xu; Wan Zhujun; Mi Renjie; Luo Zhixiang

doi:10.13756/j.gtxyj.2015.06.012

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Optimization of the wavelength-dependent loss of MEMS torsion mirror-based variable optical attenuators

- Optimization of the wavelength-dependent loss of MEMS torsion mirror-based variable optical attenuators
- Study on Optical communication Issue 6, Pages: 49-52(2015)
- 作者机构：
  
  1. 华中科技大学下一代互联网接入系统国家工程实验室
  2. 华中科技大学光学与电子信息学院
- 作者简介：
- 基金信息：
- DOI：10.13756/j.gtxyj.2015.06.012
  CLC： TN715;TN929.11
- Published：2015，
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[1]陈旭,万助军,米仁杰,罗志祥.MEMS可调光衰减器的波长相关损耗优化[J].光通信研究,2015(06):49-52.

Chen Xu, Wan Zhujun, Mi Renjie, et al. Optimization of the wavelength-dependent loss of MEMS torsion mirror-based variable optical attenuators. [J]. (6):49-52(2015)
[1]陈旭,万助军,米仁杰,罗志祥.MEMS可调光衰减器的波长相关损耗优化[J].光通信研究,2015(06):49-52. DOI： 10.13756/j.gtxyj.2015.06.012.

Chen Xu, Wan Zhujun, Mi Renjie, et al. Optimization of the wavelength-dependent loss of MEMS torsion mirror-based variable optical attenuators. [J]. (6):49-52(2015) DOI： 10.13756/j.gtxyj.2015.06.012.

摘要

基于MEMS（微机电系统）扭镜的光束偏转技术是实现VOA（可调光衰减器）的主流技术方案之一

但其存在WDL（波长相关损耗）较大的问题。通过分析WDL的成因

提出了一种优化设计方案。实验测得在波长范围1.53

.57μm与衰减范围0

0dB内

WDL最大为0.21dB

验证了理论分析的正确性。

Abstract

The bean deflection technology based on Micro-Electro-Mechanical System（MEMS）torsion mirror is one of the main technical schemes for Variable Optical Attenuators（VOA）

which is liable to high Wavelength-Dependent Loss（WDL）.This paper presents a design optimization scheme on the basis of analyzing the causes of the WDL.The experimental test results indicate that in the warelength range of 1.53

.57μm and the attenuation range of 0

0dB

the measured maximum WDL is 0.21 dB

verifying the correctness of the theoretical analysis.

关键词

光纤通信可调光衰减器波长相关损耗微机电系统

Keywords

fiber-optic communicationVOAWDLMEMS

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