Design and Simulation of InN-Based Guided-Mode Resonance Filters in the Visible Spectral Region

ZHU Wen-zhen; HUANG Ping; LüFan-min; GU Jun; LI Wei-liang; LIU Xin; HU Fang-ren

doi:10.13756/j.gtxyj.2016.01.010

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Design and Simulation of InN-Based Guided-Mode Resonance Filters in the Visible Spectral Region

- Design and Simulation of InN-Based Guided-Mode Resonance Filters in the Visible Spectral Region
- Study on Optical communication Issue 1, Pages: 32-34(2016)
- 作者机构：
  
  南京邮电大学光电工程学院
- 作者简介：
- 基金信息：
- DOI：10.13756/j.gtxyj.2016.01.010
  CLC： TN713
- Published：2016，
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[1]朱闻真,黄萍,吕凡敏,顾均,李维亮,刘昕,胡芳仁.氮化铟导模共振滤波器在可见光波段模拟分析[J].光通信研究,2016(01):32-34+70.

ZHU Wen-zhen, HUANG Ping, LüFan-min, et al. Design and Simulation of InN-Based Guided-Mode Resonance Filters in the Visible Spectral Region. [J]. (1):32-34(2016)
[1]朱闻真,黄萍,吕凡敏,顾均,李维亮,刘昕,胡芳仁.氮化铟导模共振滤波器在可见光波段模拟分析[J].光通信研究,2016(01):32-34+70. DOI： 10.13756/j.gtxyj.2016.01.010.

ZHU Wen-zhen, HUANG Ping, LüFan-min, et al. Design and Simulation of InN-Based Guided-Mode Resonance Filters in the Visible Spectral Region. [J]. (1):32-34(2016) DOI： 10.13756/j.gtxyj.2016.01.010.

摘要

根据RCWT（严格耦合波理论）和等效介质理论

提出了在可见光波段的基于半导体材料氮化铟的亚波长光栅导模共振滤波器的结构设计和仿真方法

并探讨了滤波器反射谱对光栅参数的敏感性。在维持滤波器高峰值反射率、低旁带和窄线宽不变的条件下

利用其对光栅周期的敏感性

结合仿真提出了利用微机电系统梳齿驱动器改变光栅周期（ΔT为0

9.7nm）从而线性地控制共振波长输出（调谐范围为23nm）

实现了半高全宽小于1.15nm的可调谐反射型导模共振滤波器。

Abstract

In the light of the rigorous coupled wave theory and the equivalent medium theory

we propose a design and simulation method for an InN-based sub-wavelength grating guided-mode resonance filter structure in the visible spectral region and investigate the sensitivity of the filter reflection spectrum to thegrating parameters.When the filter high-peak reflectivity

low sideband and narrow linewidth remain unchanged

we change the grating period（ΔT =0

9.7nm）by a Micro-Electro-Mechanical-System（MEMS）comb actuator using its sensibility to the grating period in connection with the simulation

thus linearly controlling the resonant wavelength output in a tunable range of 23 nm and realizing aperiod-tunable reflective guided-mode resonance filter with the Full Width at Half Maximum（FWHM）smaller than 1.15 nm.

关键词

亚波长光栅导模共振氮化铟微机电系统

Keywords

sub-wavelength gratingguide-mode resonanceInNMEMS

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