Analysis and Research of Alumina-based Guided-mode Resonance Filters

LU Zhi-cheng; ZHANG Yu-xi; ZHANG Wei; GUO Jun-hong; ZHANG Xue-hua; HU Fang-ren

doi:10.13756/j.gtxyj.2018.05.010

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Analysis and Research of Alumina-based Guided-mode Resonance Filters

- Analysis and Research of Alumina-based Guided-mode Resonance Filters
- Study on Optical communication Issue 5, Pages: 52-55(2018)
- 作者机构：
  
  南京邮电大学电子与光学工程学院
- 作者简介：
- 基金信息：
- DOI：10.13756/j.gtxyj.2018.05.010
  CLC： TN713
- Published：2018，
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[1]陆志成,张雨茜,张伟,郭俊宏,张雪花,胡芳仁.氧化铝导模共振效应滤波器的分析研究[J].光通信研究,2018(05):52-55.

LU Zhi-cheng, ZHANG Yu-xi, ZHANG Wei, et al. Analysis and Research of Alumina-based Guided-mode Resonance Filters. [J]. (5):52-55(2018)
[1]陆志成,张雨茜,张伟,郭俊宏,张雪花,胡芳仁.氧化铝导模共振效应滤波器的分析研究[J].光通信研究,2018(05):52-55. DOI： 10.13756/j.gtxyj.2018.05.010.

LU Zhi-cheng, ZHANG Yu-xi, ZHANG Wei, et al. Analysis and Research of Alumina-based Guided-mode Resonance Filters. [J]. (5):52-55(2018) DOI： 10.13756/j.gtxyj.2018.05.010.

摘要

根据等效介质理论和严格耦合波理论

提出了可见光波段下基于氧化铝材料的亚波长导模共振光栅滤波器的理论设计与仿真方法。利用Rsoft软件分别仿真分析强调制和弱调制下的氧化铝光栅反射光谱

并探讨了光栅周期（400～420nm）、占空比（0.2～0.8）和光栅厚度（117～367nm）等结构参数的改变对光栅光谱特性的影响。仿真结果表明

氧化铝光栅在610nm波长处具有优秀的滤波效果:旁带<3%

半高宽（FWHM）<0.3nm

高反射率（接近100%）。最后采用快速原子束刻蚀技术制备出了可见光波段下的氧化铝材料导模共振滤波器。

Abstract

According to the rigorous coupled wave theory and the equivalent medium theory

we propose a design and simulation methods for a sub-wavelength guided mode resonant grating filter based on the alumina material.The reflection spectrums of alumina grating in strong and weak modulation system are simulated and analyzed by Rsoft.Also

the influence of structural parameters such as grating period（400～420 nm）

duty ratio（0.2～0.8）and grating thickness（117～367 nm）on the spectral characteristics of grating are investigated.The simulation results indicate that the alumina grating has excellent filtering effect at 610 nm wavelength with the side band less than 3%

FWHM <0.3 nm and high reflectivity（close to 100%）.Finally

we fabricated a alumina resonance filter in the spectral region by fast atom beam etching technology.

关键词

亚波长光栅导模共振氧化铝可调谐滤波器

Keywords

sub-wavelength gratingsguided-mode resonancealuminum oxidetunable filter

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Key Laboratory of All Optical Network and Advanced Telecommunication Network, Ministry of Education, Institute of Lightwave Technology, Beijng Jiaotong University

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