ZHANG Shu-e, YU Xing-yuan. A Method for Measuring the Thickness of Dielectric Thin Films on the Inner Wall of a Cylindrical Cavity. [J]. (2):50-56(2020)
ZHANG Shu-e, YU Xing-yuan. A Method for Measuring the Thickness of Dielectric Thin Films on the Inner Wall of a Cylindrical Cavity. [J]. (2):50-56(2020) DOI: 10.13756/j.gtxyj.2020.02.011.
A Method for Measuring the Thickness of Dielectric Thin Films on the Inner Wall of a Cylindrical Cavity
In order to solve the problem that the water film and salt scale on the inner wall of the resonant cavity sensor could reduce the accuracy measurement of the wetness
a method for measuring the dielectric film thickness on the inner wall of cylindrical cavity is proposed in this paper. Based on the principle of dielectric perturbation method
this method uses the hyperbolic cosine-shaped slot resonator as a sensor
working at the TE
111
mode to measure the dielectric film thickness. Taking the water film as an example
the relationship between the water film thickness and the resonant frequency is deduced theoretically
and the feasibility of measuring the water film by TE
111
mode is analyzed through simulation. We establish the mathematical model of the current density distribution line of the cavity end face for the TE
111
mode by the method of vector field equation
and design the hyperbolic cosine-shaped slot resonator sensor. The simulation results show that the performances of the electromagnetic characteristics
radiation characteristics and flow characteristics of the resonator are all relatively well. The electromagnetic leakage rate is basically 0
and the sampling error is-1.25%
which meet the design requirements. The water film thickness
salt scale
oil film
fouling and other dielectric films can be measured accurately. It is also shown that the film thickness is linearly related to the resonance frequency offset
which are consistent with the theory.
关键词
介质微扰法圆柱形谐振腔介质薄膜厚度水膜厚度TE111模式
Keywords
dielectric perturbation methodcylindrical resonatordielectric film thicknesswater film thicknessTE111 mode