Research on the Displacement Sensing Structure with Varied Line-space Grating and Its Error Analysis

QIAO Fei; ZHANG Wen; HE Wei; SONG Yan-ming; MENG Fan-yong

doi:10.13756/j.gtxyj.2021.02.007

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Research on the Displacement Sensing Structure with Varied Line-space Grating and Its Error Analysis

- Research on the Displacement Sensing Structure with Varied Line-space Grating and Its Error Analysis
- Study on Optical Communications Issue 2, Pages: 35-40,53(2021)
- 作者机构：
  
  北京信息科技大学光电测试技术及仪器教育部重点实验室、光纤传感与系统北京实验室，北京　100192
- 作者简介：
- 基金信息：
- DOI：10.13756/j.gtxyj.2021.02.007
  CLC： TP212
- Published：10 April 2021，
  
  Received：18 August 2020，
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QIAO Fei, ZHANG Wen, HE Wei, et al. Research on the Displacement Sensing Structure with Varied Line-space Grating and Its Error Analysis. [J]. Study on Optical Communications (2):35-40,53(2021)
DOI：

QIAO Fei, ZHANG Wen, HE Wei, et al. Research on the Displacement Sensing Structure with Varied Line-space Grating and Its Error Analysis. [J]. Study on Optical Communications (2):35-40,53(2021) DOI： 10.13756/j.gtxyj.2021.02.007.

摘要

针对传统位移传感器测量精度低、量程小和稳定性不足的问题，文章提出并实现了一种基于变栅距光栅的位移传感器，进行位移特性测试并重点分析了测量过程中的误差问题。实验中将变栅距光栅置于电动位移平台上，通过调节平台位移控制光斑入射位置，建立光栅位移与反射光谱一级衍射中心波长之间的相关关系，实现波长对位移的编码。平台移动范围为0~20 mm，步长为2 mm，往返重复测量6次，记录各位移点处的中心波长，标定传感器的位移特性。针对各位移点重复测量产生的中心波长数据进行误差分析，采用贝塞尔公式结合别捷尔斯法分析各点多次测量数据的标准差，并结合莱以特（3

）准则进一步判定数据的可靠性。实验结果表明，该传感系统无系统误差和粗大误差；波长与位移呈线性变化，多次重复线性度优于0.994 6，传感器全量程平均位移灵敏度为16.67 nm/mm，为基于变栅距光栅位移传感系统的研究提供了一定的参考。

Abstract

Due to the low measurement precision

small measurement range and low stability of traditional displacement sensors

this paper propose and implement a displacement sensor based on varied line-space grating

with the displacement characteristic test and the error problems in the measurement process are accomplished and analyzed

respectively. In the experiment

the varied line-space grating is placed on the electric displacement platform. The incident position of the light spot is controlled by adjusting the displacement of the platform. Besides

the correlation between the grating displacement and the wavelength of the reflection spectrum first-order diffraction center is established to realize the wavelength coding of the displacement. The platform movement range is 0~20 mm

with step length of 2 mm

and the round trip repeated measurement is made for 6 times. The central wavelength at each shift point is recorded and the displacement characteristics of the sensor are calibrated. Based on the error analysis of the central wavelength data generated by repeated measurements at each shift point

the standard deviation of multiple measurements at each point is analyzed by using Bessel formula combined with the Pieters method. The reliability of the data is further determined by combining with the 3

criteria. The experimental results show that the sensor system has no systematic error and gross error. Also

the wavelength and displacement of the sensor change linearly

and the linearity of multiple repetitions is better than 0.994 6. The average displacement sensitivity of the sensor's full range is 16.67 nm/mm. The content of this paper can provide a certain research reference for displacement sensing system based on varied line-space grating.

关键词

变栅距光栅波长灵敏度线性度波长偏差

Keywords

varied line-space gratingwavelengthsensitivitylinearitywavelength deviation

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