Ultra-broadband Polarization Insensitive Optical Power Splitter based on Si<sub>3</sub>N<sub>4</sub> Waveguide

XIE Yating; HONG Yihan; ZHANG Yi; ZENG Zhihong; LU Yimin

doi:10.13756/j.gtxyj.2024.230131

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Ultra-broadband Polarization Insensitive Optical Power Splitter based on Si₃N₄ Waveguide

更新时间：2024-08-05

- Ultra-broadband Polarization Insensitive Optical Power Splitter based on Si₃N₄ Waveguide
- Study on Optical Communications Issue 4, Pages: 23013101-23013105(2024)
- 作者机构：
  
  文华学院　信息科学与技术学部，武汉　430074
- 作者简介：
- 基金信息：
- DOI：10.13756/j.gtxyj.2024.230131
  CLC： TN256
- Published：10 August 2024，
  
  Received：08 August 2023，
  
  Revised：20 August 2023，
- 稿件说明：
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谢雅婷，洪艺涵，张翼，等. 基于氮化硅波导的超宽带偏振不敏感光分束器[J]. 光通信研究，2024(4)：230131.

Xie Y T, Hong Y H, Zhang Y, et al. Ultra-broadband Polarization Insensitive Optical Power Splitter based on Si₃N₄ Waveguide [J]. Study on Optical Communications, 2024(4)：230131.
谢雅婷，洪艺涵，张翼，等. 基于氮化硅波导的超宽带偏振不敏感光分束器[J]. 光通信研究，2024(4)：230131. DOI： 10.13756/j.gtxyj.2024.230131.

Xie Y T, Hong Y H, Zhang Y, et al. Ultra-broadband Polarization Insensitive Optical Power Splitter based on Si₃N₄ Waveguide [J]. Study on Optical Communications, 2024(4)：230131. DOI： 10.13756/j.gtxyj.2024.230131.

摘要

【目的】

为了解决偏振不敏感光分束器带宽受限问题，文章提出了一种基于氮化硅（Si

）波导的超宽带偏振不敏感光分束器。

【方法】

所提光分束器采用绝热耦合波导结构设计，可在1 400~1 700 nm波长范围内实现横电（TE）模式和横磁（TM）模式的光均匀分束（光学带宽为300 nm）。

【结果】

在工作波长范围内，TE和TM模式的损耗分别小于0.10和0.15 dB。而且文章所提光分束器的结构尺寸小，仅为60.00 μm×2.75 μm，便于实现大规模集成。此外，文章还研究了所提光分束器各结构参数对器件性能的影响。

【结论】

仿真结果显示，各结构参数在±50 nm的范围内变化时，对光分束器的性能基本没有影响，表示该超宽带偏振不敏感光分束器具备较大的制备容差，易于制备。

Abstract

【Objective】

In order to solve the problem of the limited bandwidth of polarization insensitive optical power splitter

an ultra-broadband polarization insensitive optical power splitter based on Silicon Nitride (Si

) waveguide is proposed.

【Methods】

The ultra-broadband polarization insensitive optical power splitter is designed based on adiabatic coupling Si

waveguide.Optical bandwidth of 300 nm (from 1 400 ~ 1 700 nm) is demonstrated for both Transverse Electric (TE) and Transverse Magnetic (TM) modes.

【Results】

Over the entire optical bandwidth

the losses for TE and TM mode are less than 0.10 and 0.15 dB

respectively.The footprint of the proposed ultra-broadband polarization insensitive optical power splitter is only 60.00 μm×2.75 μm

which means that the optical power splitter can be used for large-scale integration.Furthermore

the relationship between the performance and the structure parameters of the proposed optical power splitter is studied.

【Conclusions】

The results show that the performance of the optical power splitter maintains almost unchanged by varying the structure parameters with ±50 nm.In other words

the optical power splitter possesses large fabrication tolerance which can be easily fabricated.

关键词

氮化硅波导光分束器偏振不敏感

Keywords

Si3N4 waveguideoptical power splitterpolarization insensitive

references

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Lumerical. Lumerical Solutions[EB/OL]. (2023-01-01)[2023-08-08]. http://www.lumerical.comhttp://www.lumerical.com.

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Ultra-broadband Polarization Insensitive Optical Power Splitter based on Si3N4 Waveguide

DOI：10.13756/j.gtxyj.2024.230131

摘要

Abstract

关键词

Keywords

references

Ultra-broadband Polarization Insensitive Optical Power Splitter based on Si₃N₄ Waveguide