ZHU Wen-zhen, HUANG Ping, LüFan-min, et al. Design and Simulation of InN-Based Guided-Mode Resonance Filters in the Visible Spectral Region[J]. 2016,(1):32-34.
ZHU Wen-zhen, HUANG Ping, LüFan-min, et al. Design and Simulation of InN-Based Guided-Mode Resonance Filters in the Visible Spectral Region[J]. 2016,(1):32-34. DOI: 10.13756/j.gtxyj.2016.01.010.
In the light of the rigorous coupled wave theory and the equivalent medium theory
we propose a design and simulation method for an InN-based sub-wavelength grating guided-mode resonance filter structure in the visible spectral region and investigate the sensitivity of the filter reflection spectrum to thegrating parameters.When the filter high-peak reflectivity
low sideband and narrow linewidth remain unchanged
we change the grating period(ΔT =0
9
9.7nm)by a Micro-Electro-Mechanical-System(MEMS)comb actuator using its sensibility to the grating period in connection with the simulation
thus linearly controlling the resonant wavelength output in a tunable range of 23 nm and realizing aperiod-tunable reflective guided-mode resonance filter with the Full Width at Half Maximum(FWHM)smaller than 1.15 nm.