The transmission characteristics of the wedge-shaped SPP waveguide are analyzed through SPP superior characteristics.In this paper

we design the wedge plasma waveguide structure with embedded grating.Diffraction grating coupling is used to analyze the exciting phenomenon of SPP.The structure characteristics are obtained by changing the thickness of the metal film and the incident light angle.The calculation results show that the metal film thickness reduction will lead to fast reduction of the transmission bandwidth as well as the transmission rate.The change of the incident light angle will also lead to the variation of the transmitted light efficiency.We also simulate the wedge surface plasmon waveguide structure to obtain the film thickness change transmission curve

angle of the incident light transmittance

and the corresponding transmission rate variation.The results in this paper are significant for nanoplasmons coupling of semiconductor equipment.