Based on the rigorous coupled wave theory and equivalent medium theory

a Si-based GaN guided-mode resonance filter with the operation wavelength ranging from 1 300 to 1 400 nm was studied.The effects of the grating period and incident angle on the reflective spectra of the filter were analyzed under strong modulation and weak modulation condition.Also

the sensitivity of the reflection spectrum under different grating period and incident angle was studied.According to the sensitivity of the reflection spectrum to the incident angle of the grating period in the strong modulation condition

an angle adjustable Sibased GaN guided-mode resonance filter was proposed.The incident angle of the grating is tuned by a MEMS electrostatic comb drive to control the output of the different resonance wavelength.The simulation results demonstrate that the incident angle could be tuned from 0.5to 5.7!and the corresponding wavelength could be tuned from 1 319 to 1 352 nm with the FWHM less than 2.2nm.