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华北电力大学电气与电子工程学院
纸质出版日期:2020,
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[1]张淑娥,喻星源.一种测量圆柱腔内壁介质薄膜厚度的方法[J].光通信研究,2020(02):50-56.
ZHANG Shu-e, YU Xing-yuan. A Method for Measuring the Thickness of Dielectric Thin Films on the Inner Wall of a Cylindrical Cavity[J]. 2020,(2):50-56.
[1]张淑娥,喻星源.一种测量圆柱腔内壁介质薄膜厚度的方法[J].光通信研究,2020(02):50-56. DOI: 10.13756/j.gtxyj.2020.02.011.
ZHANG Shu-e, YU Xing-yuan. A Method for Measuring the Thickness of Dielectric Thin Films on the Inner Wall of a Cylindrical Cavity[J]. 2020,(2):50-56. DOI: 10.13756/j.gtxyj.2020.02.011.
针对谐振腔传感器内壁水膜和盐垢会降低湿度测量精度的问题
文章提出一种用于测量圆柱腔内壁介质薄膜厚度的方法。此方法基于介质微扰法的原理
使用双曲余弦开缝形谐振腔作为传感器
工作于TE
111
模式来测量介质薄膜厚度。以水膜为例
理论推导了谐振腔水膜厚度与谐振频率的关系
并通过仿真分析了TE
111
模式准确测量水膜的可行性;采用矢量场方程的方法建立了TE
111
模式下谐振腔端面电流密度分布线的数学模型
并设计了双曲余弦开缝形谐振腔传感器。仿真结果表明:该谐振腔的电磁特性、辐射特性和流动特性均良好
电磁泄露率基本为0
取样误差为-1.25%
符合设计要求;可准确测量水膜、盐垢、油膜和污垢等介质薄膜的厚度
且它们的膜厚均与谐振频率偏移量呈线性关系
与理论相符。
In order to solve the problem that the water film and salt scale on the inner wall of the resonant cavity sensor could reduce the accuracy measurement of the wetness
a method for measuring the dielectric film thickness on the inner wall of cylindrical cavity is proposed in this paper. Based on the principle of dielectric perturbation method
this method uses the hyperbolic cosine-shaped slot resonator as a sensor
working at the TE
111
mode to measure the dielectric film thickness. Taking the water film as an example
the relationship between the water film thickness and the resonant frequency is deduced theoretically
and the feasibility of measuring the water film by TE
111
mode is analyzed through simulation. We establish the mathematical model of the current density distribution line of the cavity end face for the TE
111
mode by the method of vector field equation
and design the hyperbolic cosine-shaped slot resonator sensor. The simulation results show that the performances of the electromagnetic characteristics
radiation characteristics and flow characteristics of the resonator are all relatively well. The electromagnetic leakage rate is basically 0
and the sampling error is-1.25%
which meet the design requirements. The water film thickness
salt scale
oil film
fouling and other dielectric films can be measured accurately. It is also shown that the film thickness is linearly related to the resonance frequency offset
which are consistent with the theory.
介质微扰法圆柱形谐振腔介质薄膜厚度水膜厚度TE111模式
dielectric perturbation methodcylindrical resonatordielectric film thicknesswater film thicknessTE111 mode
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