基于Si/SiN<italic style="font-style: italic"><sub>x</sub></italic>双层波导的偏振无关光功分器

刘海广; 张跃腾; 宋雨辰; 沈晗潇; 陈鹤鸣; 汪静丽

doi:10.13756/j.gtxyj.2022.04.009

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基于Si/SiN_x双层波导的偏振无关光功分器

光电器件研究与应用 | 更新时间：2022-08-01

- 基于Si/SiN_x双层波导的偏振无关光功分器
- Design of Polarization-independent Optical Power Splitter based on Si/SiN_x Double-layer Waveguide
- 光通信研究 2022年第4期页码：42-46
- 作者机构：
  
  a.南京邮电大学　电子与光学工程学院、柔性电子（未来技术）学院，南京　210023
  b.南京邮电大学　贝尔英才学院，南京　210023
- 作者简介：
  
  刘海广（1997-），男，浙江温州人。硕士，主要研究方向为硅基偏振无关器件。
  汪静丽，副教授。E-mail：jlwang@njupt.edu.cn
- 基金信息：
  
  国家自然科学基金资助项目(61571237);江苏省自然科学基金资助项目(BK20151509);南京邮电大学校级科研基金资助项目(NY217047)
- DOI：10.13756/j.gtxyj.2022.04.009
  中图分类号： TN256
- 纸质出版日期：2022-08-10，
  
  收稿日期：2022-01-19，
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刘海广, 张跃腾, 宋雨辰, 等. 基于Si/SiN_x双层波导的偏振无关光功分器[J]. 光通信研究, 2022,(4):42-46.

LIU Hai-guang, ZHANG Yue-teng, SONG Yu-chen, et al. Design of Polarization-independent Optical Power Splitter based on Si/SiN_x Double-layer Waveguide[J]. Study on Optical Communications, 2022,(4):42-46.
刘海广, 张跃腾, 宋雨辰, 等. 基于Si/SiN_x双层波导的偏振无关光功分器[J]. 光通信研究, 2022,(4):42-46. DOI： 10.13756/j.gtxyj.2022.04.009.

LIU Hai-guang, ZHANG Yue-teng, SONG Yu-chen, et al. Design of Polarization-independent Optical Power Splitter based on Si/SiN_x Double-layer Waveguide[J]. Study on Optical Communications, 2022,(4):42-46. DOI： 10.13756/j.gtxyj.2022.04.009.

摘要

针对目前大部分偏振无关光功分器结构复杂和损耗大的问题，文章设计了一种基于Si/SiN

双层波导的偏振无关光功分器，用于1 550 nm波长光信号的1×2均匀功分。通过等离子体增强化学气相沉积（PECVD）方法调节Si/SiN

层的折射率，使同一波长下横电（TE）和横磁（TM）偏振模的二重像点位置相等，实现偏振无关功能。同时，通过对多模干涉波导宽度的合理选择，减小器件尺寸。通过优化锥形波导，进一步降低器件的插入损耗和反射损耗。运用三维（3D）有限时域差分方法进行建模仿真，仿真结果表明，文章所提偏振无关光功分器尺寸仅为3.0μm×16.8μm，插入损耗和反射损耗分别低至0.04和-48.80 dB，分光比达到了1.000 33，插入损耗小于1 dB，带宽可达380 nm，在未来的集成光路中具有潜在的应用价值。

Abstract

Aiming at the problems that most polarization-independent optical power splitters have complex structure and high loss

a polarization-independent 1×2 power splitter based on Si/SiN

double-layer waveguide is designed in this paper

which is used for equally splitting 1 550 nm optical signals. The refractive index of SiN

material can be adjusted by the Plasma Enhanced Chemical Vapor Deposition (PECVD) . The beat lengths of Transverse Electric (TE) polarization mode and Transverse Magnetic (TM) polarization mode is equal

and the polarization independent function is realized. Meanwhile

the device size is reduced by selecting the width of the multimode interference waveguide. And the insertion loss and reflection loss are further reduced by optimizing the taper waveguide. The 3D finite-difference time-domain method is used for modeling and simulation. The results show that the size of the proposed optical power splitter is only 3.0μm×16.8μm

and the insertion loss

reflection loss and splitting ratio are as low as 0.04 and-48.80 dB

and 1.000 33

respectively. The bandwidth can reach 380 nm with insertion loss less than 1 dB

which has potential application value in the future integrated optical path.

关键词

光功分器多模干涉SiNx偏振无关

Keywords

optical power splittermultimode interferenceSiNxpolarization-independent

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基于Si/SiNx双层波导的偏振无关光功分器

Design of Polarization-independent Optical Power Splitter based on Si/SiNx Double-layer Waveguide

DOI：10.13756/j.gtxyj.2022.04.009

摘要

Abstract

关键词

Keywords

references

基于Si/SiN_x双层波导的偏振无关光功分器

Design of Polarization-independent Optical Power Splitter based on Si/SiN_x Double-layer Waveguide