高均匀性1×4多模干涉耦合器的研究与设计

李赵一; 范作文; 丛庆宇; 周敬杰; 曾宪峰; 郑少南; 董渊; 胡挺; 钟其泽; 贾连希

doi:10.13756/j.gtxyj.2023.03.009

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高均匀性1×4多模干涉耦合器的研究与设计

光电器件研究与应用 | 更新时间：2023-05-25

- 高均匀性1×4多模干涉耦合器的研究与设计
- Research and Design of 1×4 Multimode Interference Coupler with High Uniformity
- 光通信研究 2023年第3期页码：53-59
- 作者机构：
  
  1.上海大学微电子学院，上海　201800
  2.中科院上海微系统与信息技术研究所，上海　200050
  3.上海微技术工业研究院，上海　201800
- 作者简介：
  
  李赵一（1998-），男，天津人。硕士，主要研究方向为硅基光电子集成。
  贾连希，正高级工程师。E-mail：jialx@mail.sim.ac.cn
- 基金信息：
  
  国家重点研发计划资助项目(2018YFB2200503)
- DOI：10.13756/j.gtxyj.2023.03.009
  中图分类号： TN252
- 纸质出版日期：2023-06-10，
  
  收稿日期：2022-07-18，
  
  修回日期：2022-08-05，
扫描看全文
李赵一，范作文，丛庆宇，等.高均匀性1×4多模干涉耦合器的研究与设计[J].光通信研究，2023(3):53-59.

Li Z Y, Fan Z W, Cong Q Y, et al. Research and Design of 1×4 Multimode Interference Coupler with High Uniformity[J]. Study on Optical Communications, 2023(3):53-59.
李赵一，范作文，丛庆宇，等.高均匀性1×4多模干涉耦合器的研究与设计[J].光通信研究，2023(3):53-59. DOI： 10.13756/j.gtxyj.2023.03.009.

Li Z Y, Fan Z W, Cong Q Y, et al. Research and Design of 1×4 Multimode Interference Coupler with High Uniformity[J]. Study on Optical Communications, 2023(3):53-59. DOI： 10.13756/j.gtxyj.2023.03.009.

摘要

针对多输出端口输出光功率的不均匀性问题，文章设计了一种基于绝缘体上硅（SOI）的1×4多模干涉（MMI）耦合器，提出了一种优化其均匀性的新方法。耦合器输入/输出端采用锥形波导，为提升MMI耦合器的均匀性，对输出端锥形波导采用不等宽设计，通过优化，四路输出端口均匀性高达0.007 4 dB，而总的插损仅有0.058 dB。依据该方法最终使得输出端波导的传输常数失配，避免了波导之间的串扰，实现了对MMI耦合器输出端口均匀性的提升。

Abstract

For the problem of inhomogeneity of the output optical power of multiple output ports

the paper designs a 1×4 Multimode Interference (MMI) coupler based on Silicon-On-Insulator (SOI) and proposes a new method to optimize its homogeneity. A tapered waveguide is used at the input/output of the coupler. To improve the uniformity of the MMI coupler

an unequal-width design is used for the tapered waveguide at the output. After optimization

the uniformity of the four output ports is as high as 0.007 4 dB

while the total insertion loss is only 0.058 dB. According to this method

the transmission constant of the output

avoid crosstalk between waveguides

and achieve an improvement in the uniformity of the output port of the MMI coupler.

关键词

硅光子学多模干涉耦合器均匀性损耗

Keywords

silicon photonicsmultimode interferometric couplersuniformityloss

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