双光子3D打印超表面光器件研究进展

吴冕; 武霖; 陶金

doi:10.13756/j.gtxyj.2023.06.002

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双光子3D打印超表面光器件研究进展

特邀 | 更新时间：2023-12-07

- 双光子3D打印超表面光器件研究进展
- Recent Progress and Comment on Metasurface Devices based on Two-photon 3D Printing
- 光通信研究 2023年第6期页码：11-31
- 作者机构：
  
  1.中国信息通信科技集团有限公司　a.光通信技术和网络全国重点实验室；b.国家信息光电子创新中心，武汉　430074
  2.鹏城实验室，广东　深圳　518000
  1a.中国信息通信科技集团有限公司　a.光通信技术和网络全国重点实验室，武汉　430074
- 作者简介：
  
  吴冕（1997－），女，江西南昌人。硕士，主要研究方向为3D光学打印和通信光电子器件。
  陶金，高级工程师。E-mail：taojin@wri.com.cn
- 基金信息：
  
  国家自然科学基金资助项目(62275208;62005225);湖北省自然科学基金重点类项目(2021CFA044)
- DOI：10.13756/j.gtxyj.2023.06.002
  中图分类号： TN929
- 纸质出版日期：2023-12-10，
  
  收稿日期：2022-12-25，
  
  修回日期：2023-01-04，
扫描看全文
吴冕，武霖，陶金.双光子3D打印超表面光器件研究进展[J].光通信研究，2023(6):11-31.

Wu M, Wu L, Tao J, et al. Recent Progress and Comment on Metasurface Devices based on Two-photon 3D Printing [J]. Study on Optical Communications, 2023(6):11-31.
吴冕，武霖，陶金.双光子3D打印超表面光器件研究进展[J].光通信研究，2023(6):11-31. DOI： 10.13756/j.gtxyj.2023.06.002.

Wu M, Wu L, Tao J, et al. Recent Progress and Comment on Metasurface Devices based on Two-photon 3D Printing [J]. Study on Optical Communications, 2023(6):11-31. DOI： 10.13756/j.gtxyj.2023.06.002.

摘要

超表面是一种周期性亚波长人工结构薄层，其与入射电磁波共振耦合所引入的相位突变打破了传统光学对空间光程累计的依赖，表现出独特的电磁学特性。过去10年来，超表面以其优于传统光学元件的超薄厚度、超短调制距离和超高分辨率光波操纵能力受到研究者们的广泛关注。并且作为超材料的二维对应物，超表面更易于被制造和集成到器件中，可以工作在微波到可见光波长范围内。常用于超表面的制造工艺包括紫外光刻、电子束光刻、聚焦离子束光刻和纳米压印等，但超表面的大规模应用仍面临加工精度与大面积、大规模制造和加工成本之间的矛盾。基于飞秒脉冲激光和双光子聚合反应的双光子三维（3D）打印技术可以实现高精度、复杂3D模型和无掩膜的一步制造，具有加工便捷和灵活的优点，以及大面积制造的潜力，被广泛应用于超表面结构研究与制备。文章对基于双光子3D打印技术制备的超表面光器件的近期研究工作进行了综述。文章首先概述了超表面的概念、优势及加工方法，然后介绍了双光子3D打印技术的原理、发展历程和工艺优势，随后分类综述和讨论了表面等离激元超表面、超透镜、超表面纳米显示与图像处理和与光纤端面集成超表面的近期研究工作，最后对基于双光子3D打印技术的超表面光器件进行了评论与展望。

Abstract

Metasurface is a thin layer that composed of periodic subwavelength artificial structures. By vibrating together with the incident electromagnetic waves

it introduces the phase jump

which breaks the traditional dependence on spatial optical path accumulation and exhibits unique electromagnetic characteristics. Metasurface has attracted great interest during the past ten years due to its ultra-thin thickness

ultrashort modulation distance and manipulation of light with ultrahigh resolution

superior to traditional optical elements. As the two-dimensional counterpart of metamaterials

it is easier to manufacture and integrate into the devices with operating wavelength ranging from microwaves to visible. The manufacturing processes commonly used for metasurfaces include ultraviolet lithography

electron beam lithography

focused ion beam lithography and nanoimprinting. However

the mass application still faces contradictions between processing accuracy and mass manufacturing and processing costs. Two-photon 3-Dimensional (3D) printing technology which is based on femtosecond pulse laser and two-photon polymerization reaction can fabricate metasurface with high precision and complex 3D structure by only one-step lithography without mask. It has the merits of processing convenience and flexibility

and has the potential of large-scale manufacturing. Therefore

it is widely used in the study and fabrication of metasurface. The paper reviews recent researches on metasurface optical devices fabricated by two-photon 3D printing technologies. An introduction to the concept

advantages and processing methods of metasurface is presented firstly

followed by the principle

development

and technological advantages of two-photon 3D printing. Recent study on metasurface devices ranging from plasmonic metasurfaces

metalens

metasurfaces for nano-display and holography

and metasurfaces integrated into fiber facet are reviewed respectively. Finally

the discussion and comments on metasurface devices based on two-photon 3D printing are given.

关键词

超表面双光子聚合三维打印光器件表面等离激元

Keywords

metasurfacetwo-photon polymerization3D printingoptical devicesurface plasmons

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