硅基微环谐振器研究进展

后林军; 冯松; 欧阳杰; 胡祥建; 李浩杰; 郭少凯; 刘勇; 王迪; 陈梦林; 冯露露; 周然; 吴鉴洋; 曾雨玲; 何心怡

doi:10.13765/j.gtxyj.2024.230084

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硅基微环谐振器研究进展

光电器件研究与应用 | 更新时间：2024-12-05

- 硅基微环谐振器研究进展
- Research Progress of Silicon based Micro Ring Resonators
- 光通信研究 2024年第6期页码：23008401-23008411
- 作者机构：
  
  西安工程大学　理学院，西安　710048
- 作者简介：
  
  后林军（1999-），男，甘肃定西人。硕士，主要研究方向为硅基光子器件。
  冯松，教授。E-mail：fengsong@xpu.edu.cn
- 基金信息：
  
  国家科技部重点研发计划资助项目(2018YFB2200500);国家自然科学基金资助项目(61204080);国家重点实验室基金资助项目(SKL201804);陕西省重点研发计划资助项目(2022GY-012;2020KW-011);西安市科技计划资助项目(2020KJRC0026)
- DOI：10.13765/j.gtxyj.2024.230084
  中图分类号： TN256
- 纸质出版日期：2024-12-10，
  
  收稿日期：2023-08-02，
  
  修回日期：2023-09-14，
- 稿件说明：
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后林军，冯松，欧阳杰，等.硅基微环谐振器研究进展[J]. 光通信研究，2024(6):230084.

Hou L J, Feng S, Ouyang J, et al. Research Progress of Silicon based Micro Ring Resonators[J]. Study on Optical Communications, 2024(6):230084.
后林军，冯松，欧阳杰，等.硅基微环谐振器研究进展[J]. 光通信研究，2024(6):230084. DOI： 10.13765/j.gtxyj.2024.230084.

Hou L J, Feng S, Ouyang J, et al. Research Progress of Silicon based Micro Ring Resonators[J]. Study on Optical Communications, 2024(6):230084. DOI： 10.13765/j.gtxyj.2024.230084.

摘要

随着大数据需求的快速增长，电子芯片及其互连技术逐渐难以满足计算和存储系统对高速数据传输和高能效的要求。相比于传统的电子芯片，硅光子学（SiP）集成芯片拥有更低的成本、更高的集成密度以及更大的通信容量。微环谐振器（MRR）作为一种重要的光学器件，具有高灵敏度、小尺寸和低功耗等优点，被广泛应用于光学通信、光电子学和传感器等领域。MRR可用于实现高速光通信和光信号处理等应用。通过在MRR中注入光信号，可以实现光信号的滤波、调制和放大等功能，从而提高光通信的传输速率和可靠性。文章主要从不同结构和不同材料两个角度总结了目前国内外硅基MRR的研究进展，分析了常规圆形、跑道型、多环级联以及其他几种结构对MRR的应用限制和性能影响，对比了不同材料在制备MRR时的优势和不足。并针对品质因子、自由频谱宽度和3 dB带宽等影响器件性能的参数做了详细的横向以及纵向比较。通过总结MRR不同结构的特点，对比不同材料平台的优势和不足，文章为未来进一步研发更高集成度和更高性能的MRR光子器件提供了思路。随着研究的不断深入和工艺的不断进步，MRR的应用不再局限于科研领域，而将更多地进入应用领域。

Abstract

With the rapid growth of big data demand

electronic chips and their interconnection technologies cannot meet the requirements of high-speed data transmission and high energy efficiency in computing and storage systems. Compared to traditional electronic chips

Silicon based Photonic (SiP) integrated chips have lower costs

higher integration density

and larger communication capacity. Micro Ring Resonator (MRR)

as an important optical device

has the advantages of high sensitivity

small size

and low power consumption

and is widely used in fields such as optical communication

optoelectronics

and sensors. MRR can be used for applications such as high-speed optical communication and optical signal processing. By injecting optical signals into the MRR

functions such as filtering

modulation

and amplification of optical signals can be achieved

thereby improving the transmission rate and reliability of optical communication. This article mainly summarizes the research progress of silicon based MRR at home and abroad from the perspectives of different structures and materials. It also analyzes the application limitations and performance effects of different structures on MRR

and compares the advantages and disadvantages of different materials in preparing MRR. The detailed horizontal and vertical comparison is made for the quality factor

free spectrum width

3 dB bandwidth and other parameters that affect the device performance. This provides ideas for the further development of MRR photonic devices with higher integration and performance in the future.

关键词

微环谐振器光通信光子器件硅光子学

Keywords

MRRoptical communicationphotonic devicesSiP

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