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Free-space Coupled Superconducting Nanostrip Single Photon Detector System based on GM Cryocooler
- Study on Optical Communications Issue 3, (2025)
- 作者机构：
1.赋同量子科技（浙江）有限公司，浙江 嘉兴 314100
2.中国科学院上海微系统与信息技术研究所 上海市超导集成电路技术重点实验室，上海 200050
3.赋同量子科技（上海）有限公司，上海 200050
- 作者简介：
- 基金信息：
DOI：10.13756/j.gtxyj.2025.250083
CLC： TN248Received：07 March 2025，
Revised：24 March 2025，
Published：10 June 2025
- 稿件说明：
移动端阅览
琚志平，覃俭，马若岩，等. 基于GM制冷机的自由空间耦合条带单光子探测系统[J]. 光通信研究，2025(3): 250083.
Ju Z P, Qin J, Ma R Y, et al. Free-Space Coupled Superconducting Nanostrip Single Photon Detection System based on GM Cryocooler[J]. Study on Optical Communications, 2025(3): 250083.
琚志平，覃俭，马若岩，等. 基于GM制冷机的自由空间耦合条带单光子探测系统[J]. 光通信研究，2025(3): 250083. DOI： 10.13756/j.gtxyj.2025.250083.
Ju Z P, Qin J, Ma R Y, et al. Free-Space Coupled Superconducting Nanostrip Single Photon Detection System based on GM Cryocooler[J]. Study on Optical Communications, 2025(3): 250083. DOI： 10.13756/j.gtxyj.2025.250083.
摘要
【目的】
2
文章旨在设计并实现一种基于Gifford-McMahon（GM）制冷机的自由空间耦合超导条带单光子探测（SNSPD）系统，以解决传统光纤耦合方式系统在近/中红外波段和偏振敏感等应用中的局限性，进一步拓展SNSPD的应用场景。
【方法】
2
文章重点解决了低振动恒温腔设计、高温区SNSPD器件制备和跨温区滤波光路设计等关键技术问题。其中，低振动恒温器结合气体交换腔和波纹管软连接技术，有效抑制了制冷机的振动传导；SNSPD芯片通过调整优化无序氮化钛铌（NbTiN）薄膜的生长参数，实现了4.2 K温区的高探测效率；跨温区滤波光路采用多种商用滤波片组合和封装盒氧化发黑处理等手段成功抑制了环境杂散光和黑体辐射。
【结果】
2
低振动制冷机的最低温可达3.45 K，并可长期稳定在3.75 K，竖直方向的振动幅度峰峰值小于4 μm，光学对准效率接近90%；系统探测效率（SDE）在最低温时可达50%，系统暗计数率（DCR）为70 cps。
【结论】
2
文章所提系统解决了传统光纤耦合方式系统在特定应用场景中的技术瓶颈，其具备优异的波长普适性、灵活的信号光耦合调谐能力以及出色的偏振保持特性。未来通过优化系统工作温度、器件制备工艺和定制滤波片加工，有望实现更高的SDE和更低的DCR。
Abstract
【Objective】
2
This study aims to design and implement a free-space-coupled Superconducting Nanostrip Single Photon Detector (SNSPD) system based on a Gifford-McMahon (GM) cryocooler
addressing the limitations of traditional fiber-coupled systems in near/mid-infrared bands and polarization-sensitive applications
and thereby expanding the application scenarios of SNSPDs.
【Methods】
2
The paper focuses on addressing several key technical issues
including the design of low-vibration constant-temperature cavities
the preparation of SNSPD devices in high-temperature zones
and the design of filtering optical paths across temperature zones. Specifically
the low-vibration cryostat
combined with gas exchange chambers and bellows flexible connection technology
effectively suppresses the vibration transmission from the refrigerator. The SNSPD chip achieves high detection efficiency in the 4.2 K temperature zone by adjusting and optimizing the growth parameters of the disordered Niobium Titanium Nitride (NbTiN) thin film. The cross-temperature-zone filtering optical path successfully suppresses environmental stray light and blackbody radiation by using a combination of various commercial filter plates and oxidation-blackening treatment of the packaging box.
【Results】
2
The low-vibration refrigerator can reach a lowest temperature of 3.45 K
and can be stabilized at 3.75 K for a long time. The peak-to-peak value of the vibration amplitude is less than 4 μm. The optical alignment efficiency is close to 90%
and the System Detection Efficiency (SDE) can reach 50% at the lowest temperature. At this time
the Dark Count Rate (DCR) of the system is 70 cps.
【Conclusion】
2
This study successfully developed a GM cryocooler-based free-space-coupled SNSPD system
overcoming the technical limitations of traditional fiber-coupled systems in specific applications. The system exhibits excellent wavelength versatility
flexible signal-light coupling tunability
and superior polarization-maintaining performance. Future optimization of operating temperature
device fabrication processes
and customized filter design is expected to achieve higher SDE and lower DCR.
关键词
Keywords
references
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